首页|期刊导航|高技术通讯（英文版）|An effective estimation of distribution algorithm for parallel litho machine scheduling with reticle constraints
高技术通讯（英文版）2016，Vol.22Issue(1)：47-54,8.DOI:10.3772/j.issn.1006-6748.2016.01.007
An effective estimation of distribution algorithm for parallel litho machine scheduling with reticle constraints
An effective estimation of distribution algorithm for parallel litho machine scheduling with reticle constraints
摘要
关键词
semiconductor manufacturing/parallel machine scheduling/auxiliary resource constraints/estimation of distribution algorithmKey words
semiconductor manufacturing/parallel machine scheduling/auxiliary resource constraints/estimation of distribution algorithm引用本文复制引用
周炳海..An effective estimation of distribution algorithm for parallel litho machine scheduling with reticle constraints[J].高技术通讯（英文版）,2016,22(1):47-54,8.基金项目
Supported by the National High Technology Research and Development Programme of China （No．2009AA043000） and the National Natural Science Foundation of China （No．61273035，71471135）． （）
