无机材料学报2016，Vol.31Issue(3)：285-290,6.DOI:10.15541/jim20150399
AlN:Er薄膜在不同退火温度下应力诱导的微观结构演变
Stress Induced Microstructure Evolution of AlN: Er Film at Different Annealing Temperature
摘要
Abstract
The microstructure evolution of AlN: Er during thermal treatment was mainly characterized by weak beam diffraction-contrast imaging and high resolution phase-contrast imaging of the transmission electron micros-copy (TEM), which was also supported by X-ray diffraction (XRD) and Raman spectroscopy. Three regions could be observed in the TEM for the implanted samples. The region Ⅰ is about 30 nm in depth below the surface, the re-gion Ⅱ is about 50 nm in depth under the region I and is the worst damaged area, and the region Ⅲ is the area below the reigion Ⅱ. At relatively low annealing temperature, such as 1025℃, the regionI disappears. However, this area can be observed again after annealing at 1200℃.Based on the results of XRD, Raman and TEM, the interesting experiment phenomenon are explained on the view of damage recovery and stress releasing. There is a large stress in the region Ⅱ due to the large radius difference between Er ions and Ga ions. In the annealing process at 1025℃, the region Ⅰ is affected by the stress from region Ⅱ, the lattice distortion in region Ⅰ is produced. Therefore, the re-gion Ⅰ is observed as region Ⅱ under TEM observation. In the annealing process at 1200℃, the stress in the region Ⅰ is released from the surface, the lattice distortion is removed and the region Ⅰ is observed again under TEM.关键词
AlN:Er/离子注入/微观结构演变Key words
AlN: Er/ion implantation/microstructure evolution分类
物理学引用本文复制引用
阳明明,莫亚娟,王晓丹,曾雄辉,刘雪华,黄俊,张纪才,王建峰,徐科..AlN:Er薄膜在不同退火温度下应力诱导的微观结构演变[J].无机材料学报,2016,31(3):285-290,6.基金项目
国家自然科学基金(61306004, 51002179, 11247023, 51272270, 61274127, 61474133) （61306004, 51002179, 11247023, 51272270, 61274127, 61474133）
江苏省自然科学基金(BK20130263, BK2012630) （BK20130263, BK2012630）
国家基础研究计划973项目(2012CB619305) （2012CB619305）
中科院引进国外杰出技术人才项目 （）
苏州纳米科技协同创新中心资金National Natural Science Foundation of China(61306004, 51002179, 11247023, 51272270, 61274127, 61474133) （61306004, 51002179, 11247023, 51272270, 61274127, 61474133）
Natural Science Fund of Jiangsu Province(BK20130263, BK2012630) （BK20130263, BK2012630）
National Basic Research Program of China (973 Program)) (2012CB619305) （973 Program）
CAS Project of Introduction of Outstanding Technical Talent （）
Collaborative Inno-vation Center of Suzhou Nano Science and Technology （）
