半导体学报（英文版）2016，Vol.37Issue(4)：24-31,8.DOI:10.1088/1674-4926/37/4/043001
Low substrate temperature deposition of transparent and conducting ZnO∶Al thin films by RF magnetron sputtering
Low substrate temperature deposition of transparent and conducting ZnO∶Al thin films by RF magnetron sputtering
Ravindra Waykar 1Amit Pawbake 1Rupali Kulkarni 1Ashok Jadhavar 1Adinath Funde 1Vaishali Waman 2Rupesh Dewan3
作者信息
- 1. School of Energy Studies, Savitribai Phule Pune University, Pune 411 007, India
- 2. Modern College of Arts, Science and Commerce, Shivajinagar, Pune 411 005, India
- 3. Department of Physics, Savitribai Phule Pune University, Pune 411 007, India
- 折叠
摘要
关键词
ZnO thin film/substrate temperature/optical propertiesKey words
ZnO thin film/substrate temperature/optical properties引用本文复制引用
Ravindra Waykar,Amit Pawbake,Rupali Kulkarni,Ashok Jadhavar,Adinath Funde,Vaishali Waman,Rupesh Dewan..Low substrate temperature deposition of transparent and conducting ZnO∶Al thin films by RF magnetron sputtering[J].半导体学报（英文版）,2016,37(4):24-31,8.
