传感技术学报2016，Vol.29Issue(3)：305-312,8.DOI:10.3969/j.issn.1004-1699.2016.03.001
基于MEMS技术的双凸台微型热电能量采集器的仿真和制备
Simulation and Fabrication of MEMS Thermoelectric Generator with Two Boss-shaped Bodies
摘要
Abstract
Based on the KOH etching,micro thermoelectric generator with two boss-shaped bodies is designed and fabricated in this paper. When the thermoelectric generator is placed in a certain temperature difference,its temper⁃ature distribution is simulated by the finite element method. Meanwhile,we conduct the mathematical modeling of the micro thermoelectric generator and simulate its output performance with its different geometrical dimensions. By curves analysis and theoretical derivation,it is obvious that the utilization rate of the temperature difference can be improved by increasing the height of the top boss-shaped body and decreased by increasing the side length of the top boss-shaped body. And it is known that the effective temperature difference,the open-circuit voltage,the loop⁃current,the output power are improved by decreasing the thermal resistance of the hot side(or the cool side). The MEMS thermoelectric generator with two boss-shaped bodies has been already successfully fabricated.关键词
MEMS/温差发电/KOH腐蚀/能量采集/塞贝克效应/有限元分析/数学建模Key words
MEMS/thermoelectric generation/energy harvester/KOH etching/seebeck effect/finite element analy-sis/mathematical modeling分类
信息技术与安全科学引用本文复制引用
吴利青,徐德辉,熊斌..基于MEMS技术的双凸台微型热电能量采集器的仿真和制备[J].传感技术学报,2016,29(3):305-312,8.基金项目
国家自然科学基金项目（51306200）；国家863计划项目 （）
