传感技术学报2016，Vol.29Issue(3)：332-337,6.DOI:10.3969/j.issn.1004-1699.2016.03.005
常压封装下隧道磁阻微陀螺的高灵敏结构设计
High Sensitive Structure Desigin of Tunnel Magnetoresistance Microgyroscope under Atmospheric Pressure
摘要
Abstract
In view of the sensitive of micro gyroscope is difficult to be higher when works under normal pressure packaging,two structures of micro gyroscope,using in-plane detection and out-plane detection respectively,are de⁃signed with the detection mechanisms of tunnel magnetoresistance. To analyze the performance of two structures , damping and detection magnetic field are considered. Firstly,damping is calculated respectively,which the sensitiv⁃ity of in-plane structure’s is 35.18 nm/(°/s) and the out-plane structure is 3.19 nm/(°/s) at atmospheric pressure. The former is 10 times higher than the latter,so the in-plane structure is better in the point of damping;Then the de⁃tection magnetic fields applying to two structures are designed,and the in-plane structure gets higher magnetic field sensitivity and better consistency compared with out-plane structure. So the in-plane structure is optimal both at the aspect of damping and detection magnetic field. Therefore,the in-plane structure of micro gyroscope based on the tunnel magnetoresistance effect can realize high sensitivity at atmospheric pressure.关键词
MEMS陀螺/隧道磁阻效应/高Q值/结构灵敏度Key words
MEMS gyroscope/tunnel magnetoresistance effect/high Q factor/mechanical sensitivity分类
机械制造引用本文复制引用
褚伟航,李孟委,吴承根,王宾..常压封装下隧道磁阻微陀螺的高灵敏结构设计[J].传感技术学报,2016,29(3):332-337,6.基金项目
国家自然科学基金项目（61571405）；基金项目（62201070516）；山西省攻关项目 （）
