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栅条状和蜂窝状结构结势垒肖特基整流器(JBSR)性能对比

高桦 柴彦科 刘肃

电子器件2016,Vol.39Issue(2):258-263,6.
电子器件2016,Vol.39Issue(2):258-263,6.DOI:10.3969/j.issn.1005-9490.2016.02.005

栅条状和蜂窝状结构结势垒肖特基整流器(JBSR)性能对比

Gridline and Honeycomb Structure of Junction Barrier Schottky Rectifier(JBSR)Performance Comparison

高桦 1柴彦科 1刘肃1

作者信息

  • 1. 兰州大学物理科学与技术学院微电子所,兰州730000
  • 折叠

摘要

Abstract

Gridline and honeycomb planar structure Junction Barrier Schottky Rectifier(JBSR)is different in the dif⁃ferent sizes of its channel effective area. From the two planar structure of Junction Barrier Schottky Rectifier of the process and electrical characteristics,the appropriate to increase the channel effective area of Junction Barrier Schottky Rectifier,the breakdown voltage of Junction Barrier Schottky Rectifier might be improved. The channel ef⁃fective area of the honeycomb planar structure of Junction Barrier Schottky Rectifier is smaller than the gridline structure,lower forward voltage,but not as better as the reverse breakdown voltage of the gridline planar structure Junction Barrier Schottky Rectifier,this may be because the P+region defects in the honeycomb structure of Junc⁃tion Barrier Schottky Rectifier are more than the gridline structure devices,likewise closely related to the I-V char⁃acteristic and structure parameters of the device.

关键词

结势垒肖特基整流器(JBSR)/沟道有效面积/电学特性/栅条形/蜂窝状

Key words

Junction Barrier Schottky Rectifier(JBSR)/the channel effective area/electrical characteristics/grid-line/honeycomb

分类

信息技术与安全科学

引用本文复制引用

高桦,柴彦科,刘肃..栅条状和蜂窝状结构结势垒肖特基整流器(JBSR)性能对比[J].电子器件,2016,39(2):258-263,6.

基金项目

甘肃省科技支撑计划项目(1204GKCA062);甘肃省功率半导体及光电器件工程实验室创新能力建设项目 ()

电子器件

OA北大核心CSTPCD

1005-9490

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