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MEMS三轴加速度计6位置标定方法的研究

石玺文 李杰 胡陈君 秦丽

电子器件2016,Vol.39Issue(2):403-406,4.
电子器件2016,Vol.39Issue(2):403-406,4.DOI:10.3969/j.issn.1005-9490.2016.02.032

MEMS三轴加速度计6位置标定方法的研究

The Research on Six-Position Calibration of MEMS Three Axis Accelerometer

石玺文 1李杰 1胡陈君 2秦丽1

作者信息

  • 1. 中北大学电子测试技术国防科技重点实验室,太原030051
  • 2. 中北大学仪器科学与动态测试教育部重点实验室,太原030051
  • 折叠

摘要

Abstract

Aiming at the problem of long time which twelve-position calibration in the research team encountered, six-position calibration of MEMS three-axis accelerometer is proposed. Firstly,the input and output model of three axis accelerometer is established,and the position arrangement and procedure of six position calibration are intro⁃duced in detail,then the calculation method of the mathematical model parameters including scale factor,installa⁃tion error coefficient and zero bias value are given. Finally,three-axis turntable experiment verified the feasibility of the six position calibration method and the accuracy of the model. The experiment results show that the six position calibration method is simple and feasible,and the accuracy can be improved by 1~2 magnitudes after compensa⁃tion,this lays the theoretical foundation of its engineering practicability.

关键词

MEMS加速度计/误差补偿/转台标定/数学模型

Key words

MEMS accelerometer/error compensation/turntable calibration/math model

分类

机械制造

引用本文复制引用

石玺文,李杰,胡陈君,秦丽..MEMS三轴加速度计6位置标定方法的研究[J].电子器件,2016,39(2):403-406,4.

基金项目

山西省自然科学基金项目 ()

电子器件

OA北大核心CSTPCD

1005-9490

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