物理学报2016，Vol.65Issue(8)：084208-1-084208-7,7.DOI:10.7498/aps.65.084208
新型离轴反射变焦距光学系统的多视场检测方法∗
Novel multiple field of view detection metho d for the off-axis reflection zo om optical system
摘要
Abstract
In order to study the computer-aided alignment for the off-axis reflective zoom optical system, the wavefront aberration of the off-axis reflective zoom system across the field of view needs to be detected. Obtaining the wavefront aberration across the field of view could improve the accuracy of the computer-aided alignment for the off-axis reflective zoom optical system. Restricted by the current wavefront aberration detection technology, only the wavefront aberration at a field degree of 0◦ could be detected. To solve this problem, a new method to detect the wavefront aberration of off-axis reflective zoom system across the field of view is proposed. According to the traditional autocollimation interferometry method, we improve the detection method by substituting the scan of standard plane mirror with the deformable mirror, replacing the interferometer with Shark-Hartmann sensor and employing the accurately calibrated laser source array to realize the wavefront aberration detection at multiple field of view simultaneously. The simulation shows that the residual wavefront aberration root-mean-square values after compensating for the deformation mirror in the following 6 fields of view (0◦, 3◦), (0◦, 4.2◦), (0◦, 5.5◦), (0◦, 7◦), (0◦, 9.8◦), and (0◦, 14◦) are 0.00039λ, 0.00075λ, 0.00024λ, 0.00017λ, 0.00053λ, and 0.0057λ, respectively. It shows that the detection method we proposed is suitable for the computer-aided alignment technology for the off-axis reflective zoom system.关键词
光学系统波像差检测/计算机辅助装调/夏克-哈特曼波前传感器/离轴反射变焦距系统Key words
wavefront aberration of optical system detection/computer-aided alignment/Shark-Hartmann sensor/off-axis reflective zoom system引用本文复制引用
周继德,常军,牛亚军,谢桂娟,王希..新型离轴反射变焦距光学系统的多视场检测方法∗[J].物理学报,2016,65(8):084208-1-084208-7,7.基金项目
国家自然科学基金(批准号:61178041)资助的课题.* Project supported by the National Natural Science Foundation of China (Grant No.61178041) （批准号:61178041）
