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基于最小二乘支持向量机的硅压阻式传感器温度补偿

杨遂军 康国炼 叶树亮

传感技术学报2016,Vol.29Issue(4):500-505,6.
传感技术学报2016,Vol.29Issue(4):500-505,6.DOI:10.3969/j.issn.1004-1699.2016.04.007

基于最小二乘支持向量机的硅压阻式传感器温度补偿

Temperature Compensation of Silicon Piezoresistive Sensor Based on Least Square-Support Vector Machine

杨遂军 1康国炼 1叶树亮1

作者信息

  • 1. 中国计量大学工业与商贸计量技术研究所,杭州310018
  • 折叠

摘要

Abstract

Aiming at the problems of the large sensitivity and zero temperature drift of the silicon piezoresistive sen⁃sor using hardware compensation,a new method based on the least square-support vector(LS-SVM)is adopted to construct the temperature compensation model. In this paper,the temperature drift property of the silicon piezore⁃sistive sensors which have been compensated by hardware are analyzed,and data with the uniform distribution of the whole temperature and pressure range is selected to be as the model input and is preprocessed to train the out⁃put data. The kernel and regularization parameter of the model is optimized by using the grid searching method and the cross-validation method,and a temperature compensation model of the sensor is established. Experiment results show the comprehensive accuracy is improved from 3.2%up to 0.25%in the temperature range of 0~100℃by tem⁃perature compensation model based on LS-SVM,this method further improves the accuracy and temperature appli⁃cation range and can be put to good use.

关键词

硅压阻式传感器/温度漂移/温度补偿/最小二乘支持向量机

Key words

silicon piezoresistive sensor/temperature drift/temperature compensation/least square-support vector machine(LS-SVM)

分类

信息技术与安全科学

引用本文复制引用

杨遂军,康国炼,叶树亮..基于最小二乘支持向量机的硅压阻式传感器温度补偿[J].传感技术学报,2016,29(4):500-505,6.

基金项目

浙江省科技厅公益技术研究社发项目 ()

传感技术学报

OA北大核心CSCDCSTPCD

1004-1699

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