化工进展2016，Vol.35Issue(5)：1263-1272,10.DOI:10.16085/j.issn.1000-6613.2016.05.001
流化床-化学气相沉积技术的应用及研究进展
Application and research progress of fluidized bed-chemical vapor deposition technology
摘要
Abstract
Fluidized bed-chemical vapor deposition (FB-CVD) is widely used in industrial production owing to the combined advantages of both fluidized bed and chemical vapor deposition. Providing good heat and mass transfer,it can obtain a pure product with uniform deposition. Based on its basic principle,the applications of FB-CVD in areas of particle coating,preparation of one-dimensional nano-materials, polycrystalline silicon,powder synthesis and powder surface modification are reviewed. The progress of process simulation and reactor structure design of FB-CVD is introduced. From the discussion,the scientific connotation of FB-CVD shows multi-scale features,namely material preparation at microscopic level, particle fluidization at mesoscopic level and reactor structure design at macroscopic level. Future development of FB-CVD technology depends on coupling analysis of these three scales,and research should be focused on the effect of interaction between different scales,such as coupling between homogeneous nucleation material/non-homogeneous nucleation in materials preparation and particle fluidization in the reactor.关键词
流化床-化学气相沉积/材料制备/过程分析/多尺度耦合Key words
fluidized bed chemical vapor deposition/material preparation/process research/multi-scale coupling分类
化学化工引用本文复制引用
刘荣正,刘马林,邵友林,刘兵..流化床-化学气相沉积技术的应用及研究进展[J].化工进展,2016,35(5):1263-1272,10.基金项目
国家自然科学基金（21306097，51302148）及高等学校博士点专项科研基金（20121010010）项目。 （）
