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基于 MEMS VOA 阵列的红外场景生成器

吕兴东 魏伟伟 张金英 杨晋玲 杨富华

航空兵器Issue(2):38-41,4.
航空兵器Issue(2):38-41,4.DOI:10.19297/j.cnki.41-1228/tj.2016.02.007

基于 MEMS VOA 阵列的红外场景生成器

IR Scene Generator Based on MEMS VOA Array

吕兴东 1魏伟伟 1张金英 1杨晋玲 1杨富华1

作者信息

  • 1. 中国科学院半导体研究所,北京 100083
  • 折叠

摘要

Abstract

A novel IR scene generator based on MEMS technology is proposed for the application of dynamic semi-physical simulation systems.The working principle and device structure of the IR scene generator composed by VOA array are investigated.The novel series of bi-directional folded beam struc-ture and its array distribution solution are proposed.This work provides the foundation for the realization of large s-cale array IR scene generator .

关键词

微机电系统/可变光衰减器/红外场景生成器/阵列/洛伦兹力

Key words

MEMS/VOA/IR scene generator/array/Lorentz force

分类

信息技术与安全科学

引用本文复制引用

吕兴东,魏伟伟,张金英,杨晋玲,杨富华..基于 MEMS VOA 阵列的红外场景生成器[J].航空兵器,2016,(2):38-41,4.

基金项目

航空科学基金项目 ()

航空兵器

OACSTPCD

1673-5048

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