金刚石与磨料磨具工程2016，Vol.36Issue(2)：6-9,23,5.DOI:10.13394/j.cnki.jgszz.2016.2.0002
用碱性抛光液化学机械抛光304不锈钢片研究
Study on chemical mechanical polishing of 304 stainless steel sheet based on alkaline polishing slurry
摘要
Abstract
To improve the effect of chemical mechanical polishing(CMP),the influence of oxidant and pH value on the material removal rate (MRR) and surface roughness has been studied.The results show that different oxidants obtain maximum MRRs at different optimal pH values,namely 181 nm∕min for hydrogen peroxide at pH = 9,177 nm∕min for chromic oxide at pH = 1 1,172 nm∕min for sodium dichromate at pH = 1 1,and 147 nm∕min for sodium hypochlorite oxidant at pH =1 1.It is also shown that the type of oxidant,the content of oxidant and the pH value in CMP slurry have little influence on the surface roughness of stainless steel in CMP 304 stainless steel.Due to high MRR, hydrogen peroxide and chromic oxide can be used as oxidants of alkaline slurry for polishing 304 stainless steel.关键词
304 不锈钢/碱性抛光液/pH 值/氧化剂/化学机械抛光/材料去除率Key words
304 stainless steel/alkaline slurry/pH value/oxidant/chemical mechanical polishing/material removal rate分类
矿业与冶金引用本文复制引用
陈佳鹏,陈绍坤,李庆,秦洪权,苏建修..用碱性抛光液化学机械抛光304不锈钢片研究[J].金刚石与磨料磨具工程,2016,36(2):6-9,23,5.基金项目
国家自然科学基金面上项目(No.51375149) （No.51375149）
