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Spatial separation effects in a guiding procedure in a modified ion-beam-sputtering process

Sina Malobabic Marco Jupé Detlev Ristau

光：科学与应用（英文版）2016，Vol.5Issue(2)：19-26,8.

光：科学与应用（英文版）2016，Vol.5Issue(2)：19-26,8.DOI:10.1038/lsa.2016.44

Spatial separation effects in a guiding procedure in a modified ion-beam-sputtering process

Sina Malobabic ¹Marco Jupé ²Detlev Ristau¹

作者信息

1. Laser Zentrum Hannover e.V., Hollerithallee 8, D-30419 Hannover, Germany
2. QUEST: Centre for Quantum Engineering and Space-Time Research, Leibniz Universit(a)t Hannover, Hannover, Germany
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摘要

关键词

EM field separation/ion beam sputtering/plasma guiding

Key words

EM field separation/ion beam sputtering/plasma guiding

引用本文复制引用

Sina Malobabic,Marco Jupé,Detlev Ristau..Spatial separation effects in a guiding procedure in a modified ion-beam-sputtering process[J].光：科学与应用（英文版）,2016,5(2):19-26,8.

基金项目

This work was supported by the Deutsche Forschungsgemeinschaft (DFG) within the framework of the Cluster of Excellence QUEST Project 201. （DFG）

光：科学与应用（英文版）

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ISSN：2095-5545

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