无线电通信技术2016，Vol.42Issue(4)：53-56,4.DOI:10.3969/j.issn.1003-3114.2016.04.14
新型紧凑硅基电光调制器研究
Study of a Novel Silicon-based Electro-Optical Modulator
摘要
Abstract
An electro⁃absorption modulator applied to microwave photonics is designed. The modulator is based on Fran⁃Keldysh effect.The topography control of selective epitaxy of GeSi on Si substrate is used for single mode and large confinement factor.3D taper, formed by topography⁃controlling method,situating at the input and output waveguide is used to decrease the coupling loss.To improve the electrical structure,Si and Ge parallel structure is adopted. For the modulator with length and width of 70 μm and 0. 7 μm, the extinction ratio and 3 dB bandwidth is 8.4 dB and larger than 50 GHz,and simultaneously the insertion loss is only 3.6 dB.关键词
微波光子学/调制器/电光集成双模Key words
Microwave photonics/modulator/electro-optical integration分类
信息技术与安全科学引用本文复制引用
李亚明,李晶..新型紧凑硅基电光调制器研究[J].无线电通信技术,2016,42(4):53-56,4.基金项目
国家自然科学基金项目 （）
