传感技术学报2016，Vol.29Issue(5)：670-674,5.DOI:10.3969/j.issn.1004-1699.2016.05.008
振动环境下MEMS加速度计的可靠性评估
Reliability Evaluation of MEMS Accelerometer in Vibration Environment
摘要
Abstract
Based on the accelerated life test and accelerated degradation test of MEMS accelerometer,the reliability technology of MEMS accelerometer in vibration environment is studied. The failure mode and failure mechanism of MEMS accelerometer in vibration environment are analyzed by theory,the accelerated life test and accelerated deg-radation test scheme are designed,and the reliability evaluation of the failure data of MEMS accelerometer under vi-bration environment is carried out. The results show that the evaluation results of the two evaluation methods are ba-sically consistent. The accelerated performance degradation assessment method is suitable for the reliability study of MEMS accelerometer in vibration environment,and the method is simple,accurate and feasible. It can provide important reference for MEMS accelerometer in practical application.关键词
MEMS加速度计/加速寿命试验/加速性能退化试验/可靠性评估Key words
MEMS accelerometer/accelerated life test/accelerated degradation test/reliability assessment分类
信息技术与安全科学引用本文复制引用
秦丽,王孟美,何蕴泽,于丽霞,刘俊..振动环境下MEMS加速度计的可靠性评估[J].传感技术学报,2016,29(5):670-674,5.基金项目
山西省自然科学基金项目(2014011021-5) （2014011021-5）
