传感技术学报2016，Vol.29Issue(5)：675-680,6.DOI:10.3969/j.issn.1004-1699.2016.05.009
微电铸中电场均匀性分布与控制方法
Electric Field Distribution Uniformity and Control Method of Microelectroforming
摘要
Abstract
Microelectroforming has recently become an important and efficient fabrication process to produce metal microdevices. To obtain ideal structures of electroforming products,electric field distribution in electroforming solu-tion plays an important role. The electric field in electroforming solution is explored. The uniformity of the electric field distribution can improve the surface quality and dimension precision of microelectroforming layers ,and en-hance the mechanical properties of electroforming microstructures. Based on three electrode system ,the method of electric field measurement is put forward. By changing the shape and position of anode,the uniformity of potential distribution in the vicinity of cathode can be obtained. Experimental results show that the uniformity of electric field distribution in electroforming solution and near the cathode is significantly improved for the semicircular hollow-cyl-inder anode. Therefore,this can improve the uniformity of electroforming layers and microelectroforming devices in practical application.关键词
微电铸/电位/半圆形空心圆柱阳极/均匀性Key words
microelectroforming/potential/semicircular hollow-cylinder anode/uniformity分类
化学化工引用本文复制引用
邵力耕,王法震,杜立群,王立鼎..微电铸中电场均匀性分布与控制方法[J].传感技术学报,2016,29(5):675-680,6.基金项目
国家自然科学基金项目(51375077) （51375077）
辽宁省自然科学基金项目(2015020117) （2015020117）
