传感技术学报2016,Vol.29Issue(6):797-801,5.DOI:10.3969/j.issn.1004-1699.2016.06.002
基于Al掺杂ZnO的丙酮气敏传感器以及紫外光激发对其气敏性能的影响
Acetone Gas Sensor Based on Al-Doped ZnO and Influence of Ultraviolet Excitation on Gas-Sensing Properties
摘要
Abstract
Al-doped ZnO(AZO)nanopower were prepared by sol-gel method. The crystal structure and surface topog⁃raphy were characterized by X-ray diffraction(XRD)and scanning electron microscopy(SEM),and tested the ultravi⁃olet-visible light spectrum of the sample to calculate the optical band-gap energy. With the sample as sensitive mate⁃rial heater gas sensor using coating method and tested the response-recovery properties of different gases. The results show that the surface of AZO is rough,and Al-doped restrains grain growth of AZO. The band-gap energy changed due to the doping of Al. When working temperature is 70℃and humidity is 27%RH,good selectivity to acetone is found with the doping the amount of 4.98wt%. The maximum sensitivity is 14 075,response and recovery time are 1 s and 3 s,respectively. UV-irradiation can improve gas sensing properties and reduced operating temperatures.关键词
氧化锌/金属氧化物/气敏性能/紫外光激发Key words
ZnO/metal oxide/sensing properties/ultraviolet excitation分类
信息技术与安全科学引用本文复制引用
孟占昆,潘国峰,侯庆忠..基于Al掺杂ZnO的丙酮气敏传感器以及紫外光激发对其气敏性能的影响[J].传感技术学报,2016,29(6):797-801,5.基金项目
国家科技重大专项课题基金项目(2009ZX02308-004);国家科技重大专项子课题基金项目 ()