传感技术学报2016，Vol.29Issue(6)：826-833,8.DOI:10.3969/j.issn.1004-1699.2016.06.007
基于阵列测量与数据融合的高精度硅压阻式气压变送器的研制
Development of a High-Precision Silicon Piezoresistive Pressure Transmitter Based on Array Measurement and Data Fusion
摘要
Abstract
The atmospheric pressure is a critical parameter for evaluating atmospheric environmental change. In or⁃der to improve the accuracy of conventional silicon-based piezoresistive pressure measurement system,a high-preci⁃sion digital pressure transmitter has been developed through MEMS pressure sensor array and data fusion with the back propagation(BP)neural network based on particle swarm optimization(PSO)algorithm. The corresponding de⁃signs of hardware and software have been elucidated,and then the transplantation and display optimization of μC/OS-II withμC/GUI on the STM32 platform have been achieved. Combining with experimental data,the application performance of PSO-BP neural network algorithm in silicon piezoresistive pressure sensors has been finally investi⁃gated and analyzed in terms of performance parameters,such as nonlinear error,hysteresis error,repeatability error and the overall accuracy. The results show that the overall accuracy of the low-cost piezoresistive pressure transmit⁃ter proposed by this paper can reach nearly ±0.095%FS in the range of-20℃~60℃,which can basically meet the requirements of meteorological applications.关键词
气压变送器/高精度/阵列测量/粒子群优化算法/反向传播神经网络/μC/OS-II与μC/GUIKey words
pressure transmitter/high precision/array measurement/particle swarm optimization algorithm(PSO)/back propagation(BP)neural network/μC/OS-II andμC/GUI分类
信息技术与安全科学引用本文复制引用
张加宏,杨敏,顾芳,李敏,葛益娴,张月香,沈雷,包志伟..基于阵列测量与数据融合的高精度硅压阻式气压变送器的研制[J].传感技术学报,2016,29(6):826-833,8.基金项目
国家自然科学基金项目（61306138，61307113，61307061）；江苏省自然科学基金项目（BK2012460）；东南大学MEMS教育部重点实验室开放研究基金课题项目（2013-3）；江苏省高等学校大学生实践创新训练计划项目（201510300034）；江苏省信息与通信工程优势学科建设项目 （）
