物理学报2016，Vol.65Issue(12)：124207-1-124207-7,7.DOI:10.7498/aps.65.124207
自支撑二值化Beynon-Gab or波带片的制备及其单级聚焦特性∗
Fabrication of self-standing binary Gab or zone plate and its single order diffraction
摘要
Abstract
The Gabor zone plate is an ideal zone plate with single focus spot, which has the potential applications in spec-troscopy, X-ray imaging, etc. However, the Gabor zone plate is very difficult to prepare because of its sinusoidal transmission characteristic, thereby restricting its applications. Traditionally, the zone plate is prepared on the trans-parent substrate such as quartz glass, polyimide, etc. This restricts the applications of Gabor zone plates in the extreme ultraviolet and soft X-ray frequency band due to the strong absorption of quartz and polyimide in such bands. <br> In this work, we report a method of preparing the self-standing binary Gabor zone plate by using the focused ion beam direct writing. By combining the techniques of focused ion beam and chemical wet etching, the binary Gabor zone plate with self-standing and curved structure is fabricated. The main characteristic parameters of the Gabor zone plate are as follows: the diameter of 1400 µm, the radius of the first zone 90 µm, the outset zone number of 60, and a gold absorber thickness of 500 nm. The focusing properties of the self-standing binary Gabor zone plate are measured at different transfer distances with a 355 nm laser. The experimental results show that the high-order focus is removed with only the first-order focus spot reserved, and the focal distance is 2.28 cm, which is in agreement with the theoretical value of 2.41 cm. The self-standing Gabor zone plate is free from the influence of the substrate. Therefore, this kind of binary Gabor zone plate has potential applications in ultraviolet and soft X-ray regions.关键词
二值化Beynon-Gabor波带片/自支撑/衍射性能/聚焦离子束直写技术Key words
binary Beynon-Gabor zone plate/self-standing/diffraction property/focused ion beam direct writing引用本文复制引用
李兆国,孟令彪,周民杰,刁凯迪,易勇,朱效立,吴卫东,张继成..自支撑二值化Beynon-Gab or波带片的制备及其单级聚焦特性∗[J].物理学报,2016,65(12):124207-1-124207-7,7.基金项目
国家自然科学基金(批准号:11404304,60908023)和国家重大科学仪器设备开发专项(批准号:2014YQ090709)资助的课题.@@@@* Project supported by the National Natural Science Foundation of China (Grant Nos.11404304,60908023) and the National Key Scientific Instrument and Equipment Development Project of China (Grant No.2014YQ090709) （批准号:11404304,60908023）
