A Bionic Fish Cilia Median-Low Frequency Three-Dimensional Piezoresistive MEMS Vector HydrophoneOA

作者：Guo-jun Hang;Zhen Li;Shu-juan Wu;Chen-yang Xue;Shi-e Yang;Wen-dong Zhang

作者单位：School of Marine Science and Technology, Northwestern Polytechnical University, Xi’an 710072, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaSchool of Marine Science and Technology, Northwestern Polytechnical University, Xi’an 710072, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China

中文关键词：MEMS vector hydrophoneBionicANSYSMedian-low frequency

英文关键词：MEMS vector hydrophoneBionicANSYSMedian-low frequency

刊名：《纳微快报（英文）》 2014 (3)

页码/页数：136-142,7

基金：This project is supported by the National Sci-ence Foundation of China (51205374,61127008) and by Shanxi province Science foundation for Youths (2012021013-3)