太赫兹科学与电子信息学报2016，Vol.14Issue(3)：481-485,5.DOI:10.11805/TKYDA201603.0481
元器件氦质谱检漏失效判据的分析
Analysis on the failure criteria for helium mass spectrum fine leak of devices
王淑杰 1王晓敏1
作者信息
- 1. 中国工程物理研究院计量测试中心，四川绵阳 621999
- 折叠
摘要
Abstract
Comparing the failure fixed methods and flexible methods in current national military standard, under the same condition, the magnitude difference of two methods results the confusion in actual applications. For the semiconductor discrete devices, electronic and electrical components and microelectronic devices which share the same volume cavity, there still exist bigger differences among their criteria of fine leak because of different styles, packages and processes. The standard criteria for fine leak in American military standard are analyzed. It is pointed out that there is still something not applicable in two standards. The standard criteria for helium mass spectrometer leak detection should be further improved.关键词
氦质谱检漏/固定法/灵活法/漏率/封装Key words
helium leak test/fixed methods/flexible methods/leak rate/package分类
信息技术与安全科学引用本文复制引用
王淑杰,王晓敏..元器件氦质谱检漏失效判据的分析[J].太赫兹科学与电子信息学报,2016,14(3):481-485,5.
