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白色光阻材料在O GS工艺中的应用

冯京 徐传祥 张方振 惠官宝 张锋 姚琪

液晶与显示2016,Vol.31Issue(6):525-531,7.
液晶与显示2016,Vol.31Issue(6):525-531,7.DOI:10.3788/YJYXS20163106.0525

白色光阻材料在O GS工艺中的应用

Application of white matrix material on one glass solution process for touch panel

冯京 1徐传祥 1张方振 1惠官宝 1张锋 1姚琪1

作者信息

  • 1. 京东方科技集团股份有限公司 技术研发中心,北京 100176
  • 折叠

摘要

Abstract

The chromaticity,resolution and adhesion strength of the white matrix materials for touch panel were analyzed at different conditions of temperatures,thickness and chemical solutions.Thus the white matrix materials were verified for one glass solution (OGS)process for touch panel.First, we focused our studies on the optical density (OD)value,resolution,chemical resistance and ther-mos-stability of the material with different thicknesses.The changes of chromaticity values at differ-ent thicknesses were studied.Then,we applied the white matrix material to the OGS touch panel process.In order to ensure the OD value being greater than 4�0 and make metal line on touch panel in-visible,we proposed a dual layer structure including white matrix layer and black matrix (BM)layer. The white matrix layer thickness was 1 5μm and the BM layer thickness was 1 .2μm.In the practical photo process,we adj usted the process parameters,such as increasing the photo-resistance thickness, exposure intensity and developing time,and successfully solved the metal open and metal remain prob-lems.In the end,the touch panel with white matrix and BM by OGS technology was demonstrated.

关键词

白色光阻/色度/耐化性/光密度

Key words

white matrix/chrominance/chemical resistance/optical density

分类

数理科学

引用本文复制引用

冯京,徐传祥,张方振,惠官宝,张锋,姚琪..白色光阻材料在O GS工艺中的应用[J].液晶与显示,2016,31(6):525-531,7.

基金项目

京东方科技集团股份有限公司研发火种基金项目(No.FR25) (No.FR25)

液晶与显示

OA北大核心CSCDCSTPCD

1007-2780

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