传感技术学报Issue(8)：1073-1077,5.DOI:10.3969/j.issn.1004-1699.2013.08.008
基于镜像异质三周期光子晶体介观压光效应的加速度传感器*
Acceleration Sensor Based on Mesopiezophotonic Effect of Mirror Structure Triply-Periodic Photonic Crystal*
摘要
Abstract
This paper employs mesoscopic calender effect of mirror Heterotrimer periodic photonic crystal to design a new type of high-sensitivity acceleration sensor and it replaces the pressure-sensitive resistive film of traditional pie-zoresistive acceleration sensor. This acceleration sensor uses four-terminal fixed beam structure and effectively eliminates the off-axis effects. Futher it also has good stability and the measurable acceleration range is 0~137 gn at room temperature. Static analysis and modal analysis are tested by ANSYS software for the design of photonic crystal acceleration sensor. It can be seen that the sensor has a maximum value of strain in the root of the cantilever and the first modal frequency is different from other three modal frequencies, thus it can effectively reduce the cross-coupling. The photonic crystal is placed in the root of the cantilever to have a maximum sensitivity of the sensor. The accelerometer has a great advantage to apply to the aerospace and military fields.关键词
光子晶体/介观压光/加速度传感器/有限元模拟Key words
photonic crystals/mesoscopic calender/acceleration sensor/finite element simulation分类
数理科学引用本文复制引用
冯瑞婷,李俊漾,温廷敦,许丽萍,李乾利..基于镜像异质三周期光子晶体介观压光效应的加速度传感器*[J].传感技术学报,2013,(8):1073-1077,5.基金项目
国家自然科学基金项目(60776062,50730009) （60776062,50730009）
