传感技术学报Issue(8)：1083-1087,5.DOI:10.3969/j.issn.1004-1699.2013.08.010
微小尺度射流流量传感器的设计与仿真分析*
Design and Simulation Analysis of Microscale Fluidic Flow Sensor*
摘要
Abstract
The accurate driving and automatical control of micro-fluid exists in many sensors and MEMS, which relies on the precise flowrate measurement in microscale. A new fluidic oscillator without feedback channel is proposed as the flowrate sensor in microscale tubes. A computational fluid dynamics( CFD) method is employed to study the measurement characteristics of the flow sensor. The inner flow distribution and oscillating procedure in chamber are analyzed qualitatively through the investigation of flow fields. The oscillation frequencies are obtained under different inlet velocities by the analysis of the pressure fluctuation in the preset points and then the functional relationship is established between the flow velocity and oscillation frequency. Simulation results indicate that the microscale fluidic flow sensor oscillates stably and the main jet switches side by side flexibly. The linear relationship between velocities and oscillation frequency can be obtained in a relatively wide measurement range,and the sensor has 0. 3% relative pressure loss,the small lower measuring limitation and fabricates easily.关键词
流量传感器/射流振荡/计算流体动力学/微小尺度/测量特性Key words
flowrate sensor/fluidic oscillation/computational fluid dynamics/micro-scale/measurement performance分类
信息技术与安全科学引用本文复制引用
于君坦,谢代梁,徐志鹏,刘铁军,梁晓瑜..微小尺度射流流量传感器的设计与仿真分析*[J].传感技术学报,2013,(8):1083-1087,5.基金项目
国家自然科学基金项目(11002137) （11002137）
浙江省自然科学基金项目(Y1091052) （Y1091052）
浙江省科技创新团队项目(2009R50024) （2009R50024）
