激光技术2016，Vol.40Issue(4)：601-605,5.DOI:10.7510/jgjs.issn.1001-3806.2016.04.030
激光冲击铜薄膜的应力波传播特性模拟分析
Simulation of propagation characteristics of stress wave in copper films with laser shock processing
摘要
Abstract
In order to study the propagation characteristics of shock wave, shock processing of copper films under the different processing parameters was simulated with finite element software. Propagation characteristics of dynamic stress wave in film-substrate system were analyzed by using stress wave theory. The results show that when the laser energy is 30mJ, shock waves are elastic. The maximum velocity of particles in thin film with the single shock is -0. 018mm/μs, the change of the velocity and the residual strain of particles in films is little with three shocks. When laser energy is 120mJ, shock waves are elastic-plastic. The maximum velocity of particles and the largest depth of the residual strain in the films with three shocks are respectively 26. 44% lower and 35. 48% higher than those with single shock. These have guiding significance to the study of propagation characteristics of shock wave.关键词
激光技术/应力波/冲击波/应变/有限元分析Key words
laser technique/stress wave/shock wave/strain/finite element analysis分类
信息技术与安全科学引用本文复制引用
张建,花银群,曹将栋..激光冲击铜薄膜的应力波传播特性模拟分析[J].激光技术,2016,40(4):601-605,5.基金项目
国家自然科学基金资助项目(51175234) （51175234）
