传感技术学报2016，Vol.29Issue(7)：977-983,7.DOI:10.3969/j.issn.1004-1699.2016.07.005
基于柔性电极结构的薄膜电容微压力传感器
Thin Film Capacitive Micro-Pressure Sensors Based on Flexible Electrode Structure
摘要
Abstract
A novel thin film capacitive micro-pressure sensor was designed and fabricated based on a flexible elec⁃trode structure. On the basis of the working principle of film capacitive pressure sensor,two kinds of designs for the capacitive micro-pressure sensor were proposed:one was based on flexible nano-films and the other was based on the flexible electrode films that with micro-structure. Meanwhile,an optimal method of the sensitivity of the pres⁃sure sensor was proposed to achieve a slimmer,simpler and more sensitive capacitive pressure sensor according to the structural feature of the micro-pressure sensor and the processing property of the flexible materials. According to the experiments,the maximum pressure sensitivity of the proposed sensor can reach 218 fF/mmHg,which shows a promising application prospect in many industrial fields such as smart wearable devices as well as implantable medical pressure sensing.关键词
柔性MEMS/电容式/压力传感器/柔性电极Key words
flexible MEMS/capacitive/pressure sensor/flexible electrode分类
信息技术与安全科学引用本文复制引用
姚嘉林,江五贵,邵娜,史云胜,田佳丁,杨兴..基于柔性电极结构的薄膜电容微压力传感器[J].传感技术学报,2016,29(7):977-983,7.基金项目
国家自然科学基金项目（51375263）；国家自然科学基金项目 （）
