传感技术学报2016，Vol.29Issue(7)：1000-1005,6.DOI:10.3969/j.issn.1004-1699.2016.07.009
高空湿度探测用加热式湿度传感器的研制
Research and Fabrication of the Heater Integrated Humidity Sensor for the Radiosonde Humidity Sounding
摘要
Abstract
In order to realize the accurate humidity measurement in the high altitude environment,the heater inte⁃grated humidity sensor is developed and investigated. This humidity sensor is used in the radiosonde humidity sounding by two heating-type humidity sensors’alternate heating dehumidification and humidity measurement. This paper reports the design and fabrication of the on-chip heating-type capacitive humidity sensor based on modified synthesis of the polyimide humidity sensitive materials. The ground experimental results indicate that the sensitivity is 0.219 5 pF/%RH,the response time is less than 1 s,the humidity hysteresis is about 4.8%RH,and the humidity drift in six months is less than ±0.3%RH. By analyzing the recovering time under different temperature, the working mechanism of two humidity sensors’alternate heating is formulated. The formulated heating time and period are 2 s and 120 s,respectively. It investigates the ground and sounding performance of heating-type humidity sensor by us⁃ing the data acquisition circuit and GPS radiosonde,and the humidity sounding result is well in line with that of VAISALA RS92. In conclusion,the heating-type humidity sensor has good ground performance,achieves alternate heating dehumidification and humidity measurement,and has a good potential in radiosonde humidity sounding.关键词
湿度传感器/高空湿度探测/加热式/湿敏电容Key words
humidity sensor/radiosonde humidity sounding/heating-type/humidity sensitive capacitor分类
信息技术与安全科学引用本文复制引用
董鹏,边旭明,赵宏忠,林树超,邓娟,黄晓杰,彭文武..高空湿度探测用加热式湿度传感器的研制[J].传感技术学报,2016,29(7):1000-1005,6.基金项目
公益性行业（气象）科研专项项目 （）
