吉林大学学报（理学版）2016，Vol.54Issue(4)：883-886,4.DOI:10.13413/j.cnki.jdxblxb.2016.04.37
衬底偏压对VC纳米薄膜摩擦学性能的影响
Effect of Substrate Bias on Tribological Properties of VC Nano Thin Films
摘要
Abstract
Using magnetron sputtering technique,VC thin films were prepared by changing the substrate bias at room temperature. We investigated the effect of substrate bias on the crystal structure,hardness and friction properties of VC thin films,and established the intrinsic relationship between them.The results show that with the increase of substrate bias,the grain is refined,the hardness and wear resistance of films are increased,and the change of the friction coefficient is slight.关键词
衬底偏压/薄膜/力学性能Key words
substrate bias/thin film/mechanical property分类
通用工业技术引用本文复制引用
徐强,杨光敏,秦宏宇,白继鹏..衬底偏压对VC纳米薄膜摩擦学性能的影响[J].吉林大学学报（理学版）,2016,54(4):883-886,4.基金项目
吉林省科技厅项目基金(批准号:2014-0101061JC) （批准号:2014-0101061JC）
