武汉工程大学学报2016，Vol.38Issue(4)：357-363,7.DOI:10.3969/j.issn.1674-2869.2016.04.009
微波法制备单晶金刚石的研究进展
Research Progress in Preparation of Mono-Crystal Diamond by Microwave Method
摘要
Abstract
The high temperature and high pressure and the chemical vapor deposition are the main methods for preparing synthetic diamond. The diamond prepared by the high temperature and high pressure has too small sizes with metal impurities, which restricts its application. Microwave plasma chemical vapor deposition has advantages of no discharge pollution, high energy conversion efficiency, and adjustable process parameters, compared with other chemical vapor deposition, and more attention was paid on it to obtain the single diamond with large size, high speed and high quality. The technologies for preparaing single crystal diamond by microwave plasma chemical vapor deposition diamond were introduced. The research progresses in improving the diamond growth rate and scaling the size of single crystal diamond were summarized. Finally, the application of single diamond was prospected.关键词
微波等离子体/化学气相沉积/单晶金刚石Key words
microwave plasma/chemical vapor deposition/single-crystal diamond分类
通用工业技术引用本文复制引用
黄平,汪建华,刘繁,翁俊,王小安..微波法制备单晶金刚石的研究进展[J].武汉工程大学学报,2016,38(4):357-363,7.基金项目
湖北省教育厅科学技术研究计划优秀中青年人才项目（Q20151517）；武汉工程大学科学研究基金项目 （）
