中南民族大学学报（自然科学版）2016，Vol.35Issue(2)：97-102,6.
沉积温度对氧化锌薄膜结构和光学性能的影响
Effect of Deposition Temperature on Structure and Optical Properties of Zinc Oxide Films Prepared by Sputtering
摘要
Abstract
The thin films of zinc oxide ( ZnO) were prepared on glass substrates by radio frequency magnetron sputtering method using a sintered ceramic target of ZnO (99.99%in purity).The effects of deposition temperature on structure and optical properties of ZnO thin films were investigated by X-ray diffractometer and spectrophotometer , respectively .The experimental results show that the deposited ZnO thin films with the hexagonal crystal structure are polycrystalline and have a strongly preferred orientation of (002) plane.The structure and optical properties of the thin films are subjected to the deposition temperature .As the deposition temperature increases , the preferred orientation of (002) plane, crystal size and average transmittance in the visible range increase monotonically , while the full widths at half maximum decreases gradually .The ZnO sample prepared at the deposition temperature of 500 °C has the best crystallite quality and optical properties, with the highest preferred orientation of (002) plane (0.987), the largest average crystal size (22.1 nm) and the highest average transmittance in the visible range (82.3%).关键词
氧化锌/薄膜/溅射/光学性能Key words
zinc oxide/thin film/sputtering/optical properties分类
信息技术与安全科学引用本文复制引用
陈首部,兰椿..沉积温度对氧化锌薄膜结构和光学性能的影响[J].中南民族大学学报（自然科学版）,2016,35(2):97-102,6.基金项目
湖北省自然科学基金资助项目 （）
