云南化工2016，Vol.43Issue(4)：22-23,54,3.DOI:10.3969/j.issn.1004-275X.2016.04.006
流化床制备三氯氢硅工艺参数的优化
Optimization of the Fluidized -bed Trichlorosilane Preparation Process Parameters
罗平 1李仕勇 1屈敏 1谭宗国 1陈福1
作者信息
- 1. 昆明冶研新材料股份有限公司 云南省光电子硅材料制备技术企业重点实验室，云南 曲靖 655000
- 折叠
摘要
Abstract
Fluidized bed preparation trichlorosilane production of polysilicon is relatively common process method.By theoretical calculation,selection of the appropriate particle size of silicon powder,com-bination with the actual production,the optimal process parameters are summed up to ensure stable operation of trichlorosilane synthesis system.关键词
硅粉/三氯氢硅/流化床Key words
fume/trichlorosilane/fluidized bed分类
化学化工引用本文复制引用
罗平,李仕勇,屈敏,谭宗国,陈福..流化床制备三氯氢硅工艺参数的优化[J].云南化工,2016,43(4):22-23,54,3.
