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沉积条件对低温各向同性热解炭形貌的影响

张建辉 夏文莉 王根明 郭鹏海

中南大学学报(自然科学版)2016,Vol.47Issue(7):2221-2226,6.
中南大学学报(自然科学版)2016,Vol.47Issue(7):2221-2226,6.DOI:10.11817/j.issn.1672-7207.2016.07.006

沉积条件对低温各向同性热解炭形貌的影响

Effect of deposition conditions on morphology of low temperature isotropic pyrocarbon

张建辉 1夏文莉 1王根明 2郭鹏海2

作者信息

  • 1. 杭州电子科技大学 机械工程学院,浙江 杭州,310018
  • 2. 兰州兰飞医疗器械有限公司,甘肃 兰州,730070
  • 折叠

摘要

Abstract

The effects of deposition temperature and propane volume fraction on the morphology of low temperature isotropic pyrocarbon (LTIC) were investigated and the morphology of deposits was accounted by the principle of nuclei−growth. The pyrocarbon was prepared by a quasi-steady-state fluidized bed chemical vapor deposition (FBCVD) with the deposition temperature from 1 250℃to 1 450℃and different propane volume fractions. The results show that the structure dominated by the presence of globular features of LTIC is more obvious as increasing the deposition temperature or propane volume fractions, with the transition from growth mode to nucleation mode in the deposition process, and the density is lower. The pyrocarbon morphology can be determined by deposition mode with deposition conditions, which is correlated to variations in the proportion of linear molecules and small aromatic hydrocarbons to polycyclic aromatic hydrocarbons (PAHS), besides the viscosity of the droplets.

关键词

化学气相沉积/低温各向同性热解炭/沉积条件/形貌/沉积机理

Key words

chemical vapor deposition/low temperature isotropic pyrocarbon/deposition conditions/morphology/deposition mechanism

分类

通用工业技术

引用本文复制引用

张建辉,夏文莉,王根明,郭鹏海..沉积条件对低温各向同性热解炭形貌的影响[J].中南大学学报(自然科学版),2016,47(7):2221-2226,6.

基金项目

国家自然科学基金资助项目(50975070);浙江省自然科学基金资助项目(LY12E05002)(Project(50975070) supported by the National Natural Science Foundation of China (50975070)

Project(LY12E05002) supported by the Natural Science Foundation of Zhejiang Province) (LY12E05002)

中南大学学报(自然科学版)

OA北大核心CSCDCSTPCD

1672-7207

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