燕山大学学报2016，Vol.40Issue(2)：158-164,7.
双源气溶胶辅助化学气相沉积制备AZO薄膜
Preparation of AZO thin films by dual-source aerosol assisted chemical vapor deposition
摘要
Abstract
Al⁃doped ZnO thin films were prepared on glass substrates with different proportions of ethanol and methanol solution by dual⁃source aerosol⁃assisted chemical vapor deposition method. The structure, morphology, optical and electrical properties were investigated by X⁃ray diffractometer, atomic force microscope, SEM, UV⁃vis double beam spectrophotometer and 4 point probe method. AZO thin films exhibited strong growth orientation along the ( 002) plane by the dual⁃source AACVD method. When the ethanol and methanol was 15mL and 20mL, respectively, the AZO thin film had best crystallization and had optimal electro⁃opotical properties. The films exhibited different morphologies with different proportions of ethanol and methanol solution.关键词
气溶胶辅助化学气相沉积法/掺杂/AZO薄膜Key words
aerosol-assisted chemical vapor deposition method/dope/AZO thin films分类
化学化工引用本文复制引用
秦秀娟,王晓娟,张丽茜,王丽欣,柳林杰..双源气溶胶辅助化学气相沉积制备AZO薄膜[J].燕山大学学报,2016,40(2):158-164,7.基金项目
河北省高等学校科学技术研究项目 （）
