激光技术2016，Vol.40Issue(5)：762-766,5.DOI:10.7510/jgjs.issn.1001-3806.2016.05.030
水射流激光复合刻蚀陶瓷的研究
Research of water jet-laser complex etching of ceramics
摘要
Abstract
In order to improve the problems that the bad morphologies are very bad in the process of laser direct etching , the method of water jet-laser complex etching was adopted .With SiC composite ceramics and Al 2 O3 ceramics as studying object materials, the etched morphologies of different componential ceramics with or without water jet were analyzed .On this basis, the effects of velocity of water jet on the etched depth and removal amount were studied .The results show that in the process of laser direct etching , a large amount of slag is attached to the etched surface , the etched morphologies are very bad , more than 60%of SiC composite ceramics are directly decomposed , the slag is less, so the morphology is better than Al2O3 ceramics slightly.In the process of water jet-laser complex etching , the etched morphologies are both turned better , and the morphology when velocity of water jet is 24m/s is better than that when 16m/s.The velocity of water jet is bigger , the etched depth and removal amount are smaller.The velocity of water jet increases every 2m/s, the removal amount reduces by an average of about 0.066mm3 .In the case of the same velocity of water jet , the removal amount of SiC composite ceramics is about 0.4mm3 , bigger than Al2 O3 ceramics.This study is helpful to improve the etched morphologies and analyze the etched mechanism of different ceramics .关键词
激光技术/复合刻蚀/SiC复相陶瓷/Al2 O3 陶瓷/水射流Key words
laser technique/complex etching/SiC composite ceramics/Al2 O3 ceramics/water jet分类
信息技术与安全科学引用本文复制引用
谢兵兵,袁根福..水射流激光复合刻蚀陶瓷的研究[J].激光技术,2016,40(5):762-766,5.基金项目
国家自然科学基金资助项目 （）
