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对称分布的三轴谐振陀螺仪的设计、分析与仿真

陈竟成 许高斌 马渊明 陈兴

传感技术学报2016,Vol.29Issue(9):1335-1340,6.
传感技术学报2016,Vol.29Issue(9):1335-1340,6.DOI:10.3969/j.issn.1004-1699.2016.09.006

对称分布的三轴谐振陀螺仪的设计、分析与仿真

Design,Analysis and Simulation of the Symmetrical Distribution of Three Axis Resonant Gyroscope

陈竟成 1许高斌 1马渊明 1陈兴1

作者信息

  • 1. 合肥工业大学电子科学与应用物理学院,安徽省MEMS工程技术研究中心,合肥230009
  • 折叠

摘要

Abstract

A square symmetrical tri-axis gyroscope structure was proposed to realize the monolithic integrated three-axis gyroscope. Firstly,the idea of design and working principle of the gyroscope was introduced,while the dynamic model with its dynamic equation was given. Then,the structure static analysis and modal analysis was simulated by using the Ansys software . The simulation results shows that the maximum stress under the applied load of 100 GHZ under load is 1.942 MPa,while the Natural frequencies of each mode are 57.345 kHz,57.382 kHz and 57.395 kHz,which means that the matching performance between modal is good. The simulation for this gyroscope structure demonstrate that the mode matching performance and resistance to overload and meet the design require⁃ments for the tri-axis gyroscope.

关键词

三轴陀螺/对称/动力学分析/抗过载/模态匹配

Key words

tri-axis gyroscope/symmetrical/dynamic analysis/overload resistance/mode matching

分类

通用工业技术

引用本文复制引用

陈竟成,许高斌,马渊明,陈兴..对称分布的三轴谐振陀螺仪的设计、分析与仿真[J].传感技术学报,2016,29(9):1335-1340,6.

基金项目

国家863计划项目 ()

传感技术学报

OA北大核心CSCDCSTPCD

1004-1699

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