传感技术学报2016，Vol.29Issue(9)：1365-1371,7.DOI:10.3969/j.issn.1004-1699.2016.09.012
半导体气体传感器动态温度调制系统设计及检测方法研究
Designer of Dynamic Temperature Modulation System and Detection Method Research for Semiconductor Gas Sensor
摘要
Abstract
Aiming at the semi-conductor gas sensor's shortcoming of poor selectivity,a method of temperature modu⁃lation detection is applied to achieve better detection performance for combustible gas. A parameter-adjustable sys⁃tem for gas sensor temperature modulation is designed. This system outputs sine wave and square wave which have adjustable frequency characters from 0 to 1 000 Hz,adjustable amplitude characters from 0 to 5 V,and an adjust⁃able duty-cycle character for square wave,also the overall design scheme and hardware design circuit are given in this paper. By using the self-made side-heated type SnO2 sensor and applying the method of square wave tempera⁃ture modulation,optimized temperature modulation parameters are obtained after detection and analysis on the two kinds of combustible gases,CO and CH4. This paper gives an idea that the temperature modulation amplitude ratio, calculated by the value the sensor responded in the air and in the measured gas,could be used as the sensitivity co⁃efficient. The testing results demonstrate that CO and CH4 gas give good approximate linearity by applying the square wave temperature modulation method for 10s period,and the linearity difference is good. The result indicates that the two kind of gases have different selectivity.关键词
气体传感器/选择性/温度调制/矩形波Key words
gas sensor/selectivity/temperature modulation/square wave分类
信息技术与安全科学引用本文复制引用
于洋,赵文杰,王欣,王暄,施云波..半导体气体传感器动态温度调制系统设计及检测方法研究[J].传感技术学报,2016,29(9):1365-1371,7.基金项目
国家自然科学青年基金项目（61501149）；黑龙江省自然科学青年基金项目（QC2013C059）；黑龙江省教育厅科技项目 （）
