机电工程技术2016，Vol.45Issue(9)：72-77,6.DOI:10.3969/j.issn.1009-9492.2016.09.017
基于PMAC的微V槽阵列精密机床研发及其误差补偿
Research and Development of Control System of High Precision Machine Tool Based on PMAC
摘要
Abstract
According to the high precision machining requirement of micro V slots spacing, the micro V slot array component grinding machine tool is researching and developing. This paper introduces the overall hardware structure of the machine tool and the selection of main parts, and introduces the structure of the machine tool control and drive system. Under the support of the software and hardware platform of the machine tool, the system control software is developed based on the IPC+PMAC motion controller. According to the high precision requirement of the micro V slots spacing,this paper carried out the research on the measurement and error compensation using laser interferometer,and the detection of processing sample using the developed machine tool. Experimental and test results show that the processing and positioning accuracy of the developed micro V slot array component grinding machine tool can be controlled within ±0.5μm,the machine tool meets the high precision requirement of micro V slot array component.关键词
微V槽阵列元件/精密机床/定位精度/误差补偿Key words
micro V slot array component/precision machine tool/positioning accuracy/error compensation分类
矿业与冶金引用本文复制引用
卿孟桥,高伟强,刘建群..基于PMAC的微V槽阵列精密机床研发及其误差补偿[J].机电工程技术,2016,45(9):72-77,6.基金项目
广东省教育部产学研结合项目（编号2013B090500125）；广东省科技计划项目 （）
