理化检验-物理分册2016，Vol.52Issue(9)：642-645,4.DOI:10.11973/lhjy-wl201609012
俄歇电子能谱仪在氧化铜定量分析中的应用
Application of Auger Electron Spectroscopy in Quantitative Analysis of CuO
肖红 1李芳芳 1陆雷 1曾荣光 1吕学超 1钟永强1
作者信息
- 1. 中国工程物理研究院 材料研究所，江油 621907
- 折叠
摘要
Abstract
The matrix effect corrections were considered in quantitative analysis by Auger electron spectroscopy (AES).Based on Monte Carlo simulation and TPP-2M model,the Auger electron backscattering factor and inelastic mean free path for copper and oxygen elements in CuO were calculated.Also,the CuO standard sample was measured by AES for ten times under the same test condition.The matrix effect correction factors were introduced into AES quantitative analysis.It was observed that the relative errors of the element contents in CuO sample were greatly reduced by the matrix effect correction,and the accuracy of AES quantitative analysis was increased greatly.关键词
俄歇电子能谱/定量分析/氧化铜/基体效应修正/背散射因子/非弹性平均自由程Key words
Auger electron spectroscopy/quantitative analysis/CuO/matrix effect correction/backscattering factor/inelastic mean free path分类
化学化工引用本文复制引用
肖红,李芳芳,陆雷,曾荣光,吕学超,钟永强..俄歇电子能谱仪在氧化铜定量分析中的应用[J].理化检验-物理分册,2016,52(9):642-645,4.
