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The algorithm for the piezoresistance coefficients of p-type polysilicon

Wang Jian Chuai Rongyan

半导体学报（英文版）2016，Vol.37Issue(8)：10-14,5.

半导体学报（英文版）2016，Vol.37Issue(8)：10-14,5.DOI:10.1088/1674-4926/37/8/082001

Wang Jian ¹Chuai Rongyan²

作者信息

1. School of Information and Engineering, Shenyang University of Chemical Technology, Shenyang 110142, China
2. School of Information Science and Engineering, Shenyang University of Technology, Shenyang 110870, China
折叠

piezoresistance coefficient/polysilicon nanofilm/tunneling piezoresistance model/p-type polysilicon

piezoresistance coefficient/polysilicon nanofilm/tunneling piezoresistance model/p-type polysilicon

Wang Jian,Chuai Rongyan..The algorithm for the piezoresistance coefficients of p-type polysilicon[J].半导体学报（英文版）,2016,37(8):10-14,5.

Project supported by the National Natural Science Foundation of China (No.61372019). （No.61372019）

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ISSN：1674-4926

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