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Semiconductor steady state defect effective Fermi level and deep level transient spectroscopy depth profiling

Ken K.Chin Zimeng Cheng

半导体学报(英文版)2016,Vol.37Issue(9):26-32,7.
半导体学报(英文版)2016,Vol.37Issue(9):26-32,7.DOI:10.1088/1674-4926/37/9/092003

Semiconductor steady state defect effective Fermi level and deep level transient spectroscopy depth profiling

Semiconductor steady state defect effective Fermi level and deep level transient spectroscopy depth profiling

Ken K.Chin 1Zimeng Cheng1

作者信息

  • 1. Department of Physics and CNBM New Energy Materials Research Center, New Jersey Institute of Technology(NJIT), Newark, NJ 07102, USA
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摘要

关键词

Fermi level/deep level transient spectroscopy/Schottky junction

Key words

Fermi level/deep level transient spectroscopy/Schottky junction

引用本文复制引用

Ken K.Chin,Zimeng Cheng..Semiconductor steady state defect effective Fermi level and deep level transient spectroscopy depth profiling[J].半导体学报(英文版),2016,37(9):26-32,7.

半导体学报(英文版)

OACSCDCSTPCDEI

1674-4926

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