工程科学学报2016，Vol.38Issue(8)：1190-1195,6.DOI:10.13374/j.issn2095-9389.2016.08.020
带并行腔和重入约束的双臂集束型设备调度方法
Scheduling method for dual-blade cluster tools with parallel chambers and reentrancy constraints
摘要
Abstract
To effectively solve the scheduling problems of dual-blade cluster tools with parallel processing chambers and reentran-cy constraints in semiconductor manufacturing, this article introduces a scheduling method centering on optimal searching. Firstly, according to the optimization search rule ( FIFO) , a mathematical programming model of 4-chamber dual-blade cluster tools with paral-lel processing chambers and reentrancy constraints was built to minimize the makespan of the system. Combined with the concept of virtual buffer module, an optimum searching algorithm was proposed based on the robot swap strategy. Finally, simulation experiments were conducted for the proposed algorithm, and the results indicate that the algorithm is feasible and effective.关键词
调度方法/集束型设备/并行腔/重入Key words
scheduling methods/cluster tools/parallel chambers/reentrancy分类
信息技术与安全科学引用本文复制引用
周炳海,黎明,苏谊..带并行腔和重入约束的双臂集束型设备调度方法[J].工程科学学报,2016,38(8):1190-1195,6.基金项目
国家自然科学基金资助项目(61273035,71471135) （61273035,71471135）
