原子能科学技术2016，Vol.50Issue(9)：1664-1672,9.DOI:10.7538/yzk.2016.50.09.1664
氢气流量对类金刚石薄膜结构与性能的影响
Effect of Hydrogen Flow on Structure and Properties of Diamond Like Carbon Films
摘要
Abstract
Diamond like carbon (DLC) films were deposited on Si (100) substrate by coupling DC and RF reactive magnetron sputtering .The deposition rate ,the chemical structure ,the surface roughness ,the surface morphology and the mechanical property were studied .The thicknesses of DLC films were measured by the surface profiler tech‐nology .The chemical compositions of DLC films were characterized by Raman spectros‐copy and X‐ray photoelectron spectroscopy (XPS) .The mechanical properties of DLC films were investigated by nanoindentation techniques and the stress in DLC films was measured by substrate curvature method .T he surface roughness and surface morpholo‐gy were characterized by atomic force microscopy (AFM ) and scanning electron micros‐copy (SEM ) ,respectively .It is found that the deposition rate decreases ,while the sp3 content in the DLC films increases with the hydrogen flow .When the hydrogen flow is at 25 mL/min ,the sp3 content reaches 36.3% ,and the hardness and modules of films reach the maximum value of 17.5 GPa and 137 GPa ,respectively .The internal stress of DLC films prepared at different hydrogen flows is less than 0.5 GPa .The coupling DC and RF reactive magnetron sputtering may be really an effective method to prepare high quality thick DLC films with low internal stress .When the hydrogen flow increases ,the surface of the DLC films becomes denser and smoother ,the surface root mean square roughness decreases from 5.40 nm to 1.46 nm .关键词
反应磁控溅射/类金刚石薄膜/氢气流量/X射线光电子能谱/厚膜Key words
reactive magnetron sputtering/diamond like carbon film/hydrogen flow/X-ray photoelectron spectroscopy/thick film分类
通用工业技术引用本文复制引用
刘磊,王涛,何智兵,张玲,易勇,杜凯..氢气流量对类金刚石薄膜结构与性能的影响[J].原子能科学技术,2016,50(9):1664-1672,9.基金项目
等离子体物理重点实验室基金资助项目 （）
