压力容器2016，Vol.33Issue(8)：13-19,26,8.DOI:10.3969/j.issn.1001-4837.2016.08.003
多晶硅 CVD 反应器中新型热管的开发与仿真
Development and Simulation of New-type Heat Pipes in Polysilicon CVD Reactor
摘要
Abstract
Based on the new designed polysilicon CVD reactor,a kind of special heat pipe was developed to obtain ideal velocity field and temperature field.Some finite element strength analysis and CFD simula-tions were applied to improve the structure and calculate the relation between consumption and different surface emissivity and surface temperature of the heat pipes.The results show that the average temperature increase versus the surface temperature of heat pipes,but the both of the total energy consumption and ra-diation energy consumption decrease;when surface temperature increases from 423 K to 623 K,the total energy consumption and radiation energy consumption decrease by 2.84% and 3.87% respectively;the average temperature,total energy consumption and radiation energy consumption show a trend of decline versus surface emissivity;the total energy consumption and radiation energy consumption decrease by 21.75% and 24.42% respectively.关键词
多晶硅/CVD反应器/热管/有限元/CFDKey words
polysilicon/CVD reactor/heat pipe/finite element/CFD分类
机械制造引用本文复制引用
王晓静,马东云,李文艳,张灿..多晶硅 CVD 反应器中新型热管的开发与仿真[J].压力容器,2016,33(8):13-19,26,8.基金项目
天津市自然科学基金资助项目 （）
