中南民族大学学报（自然科学版）2016，Vol.35Issue(3)：13-16,4.
AlTiSiN／AlCrSiN 纳米多层复合涂层的结构及性能研究
Microstructure and Mechanical Properties of AlTiSiN/AlCrSiN Multilayer Coatings
摘要
Abstract
AlTiSiN/AlCrSiN nanocomposite coatings were deposited on Si and cemented carbide substrate using AlTiSi , AlCrSi cathodes by vacuum cathodic arc evaporation .The influence of N 2 pressure on the structure and mechanical properties of the coatings were investigated systematically .The morphology and phase structure were investigated by SEM and XRD.The micro hardness and coefficient of friction were measured by the micro hardness tester and friction and wear tester.The results showed that N 2 pressure had great influence on the microstructure and mechanical properties of the coatings.The coatings were polycrystalline which exhibited NaCl-type TiN and CrN phase.The diffraction peaks of the coatings had a certain deviation due to the multi element doping compared with the pure TiN and CrN diffraction peaks . With the increase of N2 pressure, the intensity of the diffraction peaks of the coating decreased and widened gradually , suggesting that the grain size decreased with the increase of the N 2 pressure.The particle pollution was closely related to the deposition pressure .The particle size and the surface roughness decreased with the increase of the pressure .The coating hardness increased from 2437.9 HK to 3221.5 HK gradually when N2 pressure increased from 2.0 Pa to 4.0 Pa.The tribological properties of the coatings were also closely related to nitrogen pressure .When the pressure was lower than 3.0 Pa, the average friction coefficient was about 0.410, while the average friction coefficient decreased to 0.258 when N2 pressure was higher than 3.0 Pa.关键词
电弧离子镀/AlTiSiN/AlCrSiN复合涂层/氮气压强/显微硬度/摩擦系数Key words
multi-arc/AlTiSiN/AlCrSiN/N2 pressure/microhardness/friction coefficient分类
矿业与冶金引用本文复制引用
杨兵,刘琰,刘辉东,罗畅,万强,蔡耀,陈浩,陈燕鸣..AlTiSiN／AlCrSiN 纳米多层复合涂层的结构及性能研究[J].中南民族大学学报（自然科学版）,2016,35(3):13-16,4.基金项目
国家自然科学基金资助项目 （）
