硅酸盐学报2016，Vol.44Issue(10)：1477-1481,5.DOI:10.14062/j.issn.0454-5648.2016.10.14
含Ti-Al阻挡层的硅基Na0.5Bi0.5TiO3电容器的结构与电学性能
Structure and Electrical Properties of Na0.5Bi0.5TiO3 Capacitor using Ti-Al as Barrier Layer on Si Substrate
摘要
Abstract
La0.5Sr0.5CoO3(LSCO)/Na0.5Bi0.5TiO3/La0.5Sr0.5CoO3(LSCO/NBT/LSCO) ferroelectric capacitor heterostructure was fabricated on (001)Si substrate with amorphous Ti–Al film as a diffusion barrier layer, in which the LSCO and Ti-Al films both were prepared by magnetron sputtering (MS), and the NBT was prepared by a pulsed laser deposition method (PLD). The structural and physical properties of Na0.5Bi0.5TiO3 film were characterized. The results show that the Ti-Al barrier is amorphous, and the NBT film consists of the crystallines. The LSCO/NBT/LSCO capacitor presents a saturated hysteresis loop, a high remnant polarization (i.e., 47.9μC/cm2), a small pulse width dependence, good fatigue and retention characteristics at an applied field of 1500kV/cm. Moreover, the leakage mechanism of the LSCO/NBT/LSCO ferroelectric capacitor was investigated. The LSCO/NBT/LSCO capacitor has the Ohm conduction behavior at applied fields of < 400kV/cm and bulk-limited space charge-limited conduction (SCLC) at the applied fields of > 400kV/cm.关键词
钛酸铋钠薄膜/铁电电容器/剩余极化强度/漏电流Key words
sodium bismuth titanate thin films/ferroelectric capacitors/remnant polarization/leakage current分类
数理科学引用本文复制引用
宋建民,罗来慧,宋安英,魏丽静,代秀红,方晓燕,李振娜,刘保亭..含Ti-Al阻挡层的硅基Na0.5Bi0.5TiO3电容器的结构与电学性能[J].硅酸盐学报,2016,44(10):1477-1481,5.基金项目
国家自然科学基金项目(11374086)；河北省自然科学基金项目(E2014201188, E2014201063)；保定市科技局基金项目(15ZG048)；河北农业大学(ZD201614)资助项目。 （11374086）
