传感技术学报2016，Vol.29Issue(10)：1483-1485,3.DOI:10.3969/j.issn.1004-1699.2016.10.003
梳齿式电容加速度传感器等效并联电阻对器件输出产生的影响
Analysis of the Effect of the Equivalent Parallel Resistor of theComb Capacitive Accelerometer
摘要
Abstract
Measurement of the sensing capacitance among the structure of the comb accelerometer could be affected by the equivalent electrical parameters besides the sensing capacitance. Equivalent electrical parameters of Multi⁃layer Ceramic Capacitance(MLCC)have been studied,since the structure of the comb accelerometer is similar to Multilayer Ceramic Capacitance(MLCC),the equivalent electrical parameters of the comb accelerometer could be analyzed in the same way. This paper will introduce the model of the sensing capacitance with equivalent electrical parameters and analyzes the effect of these parameters on the measurement result.关键词
MEMS/梳齿式电容加速度传感器/Pspice电路仿真/电荷放大电路/等效并联电阻Key words
MEMS/comb capacitive accelerometer/pspice circuit simulation/charge amplify circuit/equivalent parallel resistor分类
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曲昊,彭倍,曾建,周吴,于慧君..梳齿式电容加速度传感器等效并联电阻对器件输出产生的影响[J].传感技术学报,2016,29(10):1483-1485,3.基金项目
This work was supported in part by NSAF（U1530132）；National Natural Science Foundation of China （）
