计量学报2016,Vol.37Issue(5):489-493,5.DOI:10.3969/j.issn.1000-1158.2016.05.08
近贴X射线成像系统调制传递特性联合检测方法
A Combination of Measuring Methods for ModuIation Transfer Characteristic of Proximity X-ray Imaging System
摘要
Abstract
Using the evaluating principle of modulation transfer function,an optical modulation transfer characteristic detection methodology of proximity focusing X-ray imaging system is brought up on the basis of the signal transfer relationship between each imaging subsystem. From the constraints of image-intensifier tubes,the generation process of ray source and imaging restriction of its spot size constraints,the constraints of noise three perspectives to calibrate theoretical modulation transfer characteristic of proximity X-ray imaging system. Change CCD telescopic system of proximity X-ray imaging system back end to CCD microscopy system,to multi-spatial resolution balls of lead grating imaging and MTF curve fitting,and as the experimental results suggest,the curve fitting precision can be significantly improved by time domain equalization. Fitting results indicate that modulation transfer function still are equal to 10% when spatial resolution reaches 10lp/mm,this is consistent with that of the theoretical calibration. So that the resolution of traditional proximity X-ray imaging system is really the bottleneck.关键词
计量学/X射线/电子光学系统/调制传递函数/分辨率Key words
metrology/X-ray/electro-optical systems/modulation transfer characteristic/resolution分类
通用工业技术引用本文复制引用
母一宁,王贺,李野,李平,朱泠西..近贴X射线成像系统调制传递特性联合检测方法[J].计量学报,2016,37(5):489-493,5.基金项目
国家技术创新基金(13C26212201166);吉林省青年科研基金 ()