有色金属材料与工程2016，Vol.37Issue(4)：132-137,6.DOI:10.13258/j.cnki.nmme.2016.04.002
ZrSiN 纳米复合膜的显微结构、力学性能和强化机理
Microstructure,Mechanical Property and Strengthening Mechanism of ZrSiN Nanocomposite Film
摘要
Abstract
By using ZrSi composite targets with different compositions,ZrSiN nanocomposite films with different Si content were synthesized on Si substrate by magnetron sputtering.The effects of Si content on microstructure and mechanical properties of ZrSiN nanocomposite films were investigated by X-ray diffraction (XRD),scanning electron microscopy (SEM),high resolution transmission electron microscopy (HRTEM)and nano-indentation techniques.The results show that,with the increase of Si content,the crystallization degree of the film firstly increases and then decreases.Accordingly,the hardness and elastic modulus of the film firstly improves and then deteriorates.When the atomic ratio of Si to Nb is 1∶24,the maximum values of hardness and elastic modulus of ZrSiN film reach 31.6 GPa and 320.6 GPa,respectively.The microstructural observations indicate that ZrSiN film presents a nanocomposite structure with ZrN nanocrystallites surrounded by crystallized Si3 N4 interfacial phase,which can coordinate misorientations between adjacent ZrN nanocrystallites and grow coherently with them,suggesting that the strengthening effect of ZrSiN nanocomposite film can be attributed to the coherent epitaxial interface between ZrN nanocrystallites and Si3 N4 interfacial phase.关键词
ZrSiN 纳米复合膜/显微结构/共格/力学性能/强化机理Key words
ZrSiN nanocomposite film/microstructure/coherent/mechanical properties/strengthening mechanism分类
化学化工引用本文复制引用
李伟,陈朋灿,刘京京..ZrSiN 纳米复合膜的显微结构、力学性能和强化机理[J].有色金属材料与工程,2016,37(4):132-137,6.基金项目
国家自然科学基金项目（51471110）；高性能陶瓷和超微结构国家重点实验室开放课题基金 （）
