激光技术2016，Vol.40Issue(6)：791-795,5.DOI:10.7510/jgjs.issn.1001-3806.2016.06.004
GaN基微腔传感器悬空隔膜的力电转换的ANSYS研究
ANSYS analysis of force-electric conversion of floating diaphragm for GaN-based micro-cavity sensors
摘要
Abstract
In order to figure out piezoelectric effect and mechanical properties of GaN film, a physics-based model was proposed in this study. Based on the theory that gas absorbed infrared directly, micro-cavity infrared sensor with GaN/AlGaN floating membrane was put as background and AlGaN/GaN floating membrane was put as sensitive element. After theoretical analysis and experimental verification of materials mechanics and piezoelectric effect by using finite element analysis software ANSYS 14. 0, datas of the logical relationship between output voltage, membrane sensitivity and shapes, thickness, area were gotten, and the feasibility of membrane force-electric signal conversion mechanism was verified. The results show that GaN film has good piezoelectric performance and linearity which make a good contribution to forecast the sensor output signal accurately and make temperature compensation. The proposed model is useful to make a theoretical foundation for better design of micro cavity infrared sensor with good performance and high sensitivity.关键词
薄膜/输出电压/ANSYS 14. 0/机械应力/压电效应Key words
thin films/output voltage/ANSYS 14. 0/mechanical force/piezoelectic effect分类
数理科学引用本文复制引用
朱彦旭,杜志娟,刘飞飞,于宁,王岳华,宋会会,王红航..GaN基微腔传感器悬空隔膜的力电转换的ANSYS研究[J].激光技术,2016,40(6):791-795,5.基金项目
国家科技支撑计划资助项目(2011BAE01B14) （2011BAE01B14）
北京市15青年拔尖基金资助项目(311000543115501) （311000543115501）
中山市科技计划资助项目(2014A2FC305) （2014A2FC305）
科研基地建设基金资助项目(PXM2014-014204-500008) （PXM2014-014204-500008）
