桂林电子科技大学学报2016，Vol.36Issue(5)：421-425,5.
LTCC层压工艺对垂直互联柱错位的影响
Impact of LTCC laminating process on vertical interconnection column misalignment
摘要
Abstract
During LTCC laminating process,the vertical interconnection column will generate misalignment.A three-dimen-sional model of LTCC microwave component is established by finite element software ANSYS,and the influence of LTCC laminating process on vertical interconnection column misalignment is studied.The results show that during LTCC lamina-ting process,the viscous deformation on material eventually leads to vertical interconnection column misalignment.Pressure is the main factor that leads to the misalignment of vertical interconnection column.Laminating process parameters are com-bined by pressure of 10 MPa,temperature of 50 ℃,time of 6 min and diameter of 0.26 mm,the vertical interconnection column misalignment is 1 .39%.关键词
LTCC/层压工艺/垂直互联柱/错位Key words
LTCC/laminating process/vertical interconnection column/misalignment分类
信息技术与安全科学引用本文复制引用
罗天宏,廖志平,周德俭..LTCC层压工艺对垂直互联柱错位的影响[J].桂林电子科技大学学报,2016,36(5):421-425,5.基金项目
国防 973 项目"多能量***研究" （）
